The following table shows a summary of the facilities available for solar research at the Australian National University.
| Item |
Capability summary |
Location |
| Pulsed Laser Deposition |
Thin film deposition |
EME |
| Sputter deposition system |
Thin film deposition |
EME |
| Dual frequency PECVD (to be ordered) |
Thin film deposition |
EME |
| Oxford Plasmalab 80+ PECVD |
Thin film deposition |
EME |
| Southern cross-PECVD and sputter deposition |
Thin film deposition |
PRL |
| Platipus-PECVD |
Thin film deposition |
PRL |
| Helicon activated reactive evaporation -HARE |
Thin film deposition |
PRL |
| PLD system |
Thin film deposition |
LPC |
| DC sputter deposition system |
Thin film deposition |
LPC |
| Roth & Rau AK 400 PECVD |
Thin film deposition |
CSES |
| APCVD |
Thin film deposition |
CSES |
| LPCVD |
Thin film deposition |
CSES |
| e-beam evaporator-Temescale |
Metal and dielectric deposition |
EME |
| e-beam evaporator |
Metal and dielectric deposition |
LPC |
| Edwards thermal evaporator |
Metal deposition |
EME |
| 2×Varian deposition systems |
Metal deposition |
CSES |
| ALD system (on order) |
Thin film dep. and epitaxial growth |
EME |
| Aixtron 200/4 MOCVD reactor |
Epitaxial growth |
EME |
| Thomas Swan MOCVD reactor |
Epitaxial growth |
EME |
| Oxford Plasmalab 80+ RIE |
etching |
EME |
| ICPRIE (on order) |
etching |
EME |
| Oxford Plasmalab system100-ICP etching |
etching |
LPC |
| Etch machine |
etching |
PRL |
| ICP etching |
etching |
CSES |
| AET-Rapid Thermal Annealer |
RTA |
EME |
| JetFirst - Rapid Thermal Annealer |
RTA |
EME |
| UniTemp RTA |
RTA |
CSES |
| Tube furnaces |
Annealing/oxidation |
EME |
| Furnaces |
Annealing/oxidation |
CSES |
| Ion implanters (High and low energy) |
implantation |
EME |
| Wire Bonder-MEC |
Metal wire bonding |
EME |
| Nanoimprint Lithography |
Patterning wafers |
EME |
| Raith 150 Electron beam lithography |
Patterning wafers |
EME |
| Karl Suss MJB3 |
Patterning wafers |
EME |
| Nano-imprint lithography system |
Patterning wafers |
LPC |
| Karl Suss MA6 |
Patterning wafers |
EME |
| SVG 8600 coat and develop track |
Resist coating for lithography |
LPC |
| Photolithography (--) |
Patterning wafers |
CSES |
| Laser scriber |
Patterning wafers |
CSES |
| K&S 7100 dicing saw |
Dicing wafers |
LPC |
| 2×dicing saws |
Dicing wafers |
CSES |
| Temperature dependent I-V/C-V |
Electrical characterization |
EME |
| DLTS |
Electrical characterization |
EME |
| ECV profiling |
Electrical characterization |
EME |
| Hall measurement system |
Electrical characterization |
EME |
| Four point probe measurement |
Electrical characterization |
CSES |
| Quicky solderer |
soldering |
CSES |
| Selective wave solderer (ESBO SPA 300-F) |
soldering |
CESE |
| Spot welding |
soldering |
CSES |
| Screen printing |
Making metal contacts |
CSES |
| Spin rinser |
Cleaning wafers |
CSES |
| Optical microscope with a video camera |
Optical imaging |
LPC |
| Optical microscopes |
Optical imaging |
EME |
| Laser-diode/Photodetector characterization setup |
- |
EME |
| PL/PLE setup |
Absorption and emission characteristics of a semiconductor |
EME |
| Micro PL/Raman |
Emission characteristics and bond mapping of a sample |
EME |
| Micro-Raman system |
Bond mapping |
LPC |
| DSC (Differential scanning caloriemetry) and TGA (Thermal Gravimetry Analysis) |
Thermal analysis |
EME |
| Pananalytic XRD system |
XRD |
EME |
| DC-XRD- Bede QC2a |
XRD |
EME |
| Powder XRD |
XRD |
EME |
| Ion-Mill |
TEM sample preperation |
EME |
| Gatan Duomill-Ion-mill |
TEM sample preperation |
EME |
| FEI/Zeiss FIB system |
TEM sample preparation/Nano-manipulation |
EME |
| Nanoindentation |
|
EME |
| RBS-C-NEC |
Elemental composition & damage studies |
EME |
| Metricon prism coupler |
Optical characterization of thin films |
LPC |
| Filmtec 4000 plasma system |
Optical characterization of thin films |
LPC |
| Filmetrics F20 |
Optical characterization of thin films |
CSES |
| Flash IV tester |
IV reponse of solar cells |
CSES |
| TEPLA 400 plasma system |
Plasma cleaning |
LPC |
| Photodeflection spectrometer |
Measuring optical losses |
LPC |
| Ovens |
- |
LPC,EME |
| Low temperature cryostat |
- |
EME |
| Oxygen free glove box |
- |
EME |
| Fume cupboards |
- |
EME/LPC/CSES |
| Sinton lifetime testers |
Carrier lifetime |
CSES |
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