AJA International Sputter
Capabilities
- Materials: Dielectrics (SiOx, SiNx, AlOx), semiconductors (Si), metal oxides (TCOs: ITO, IZO, AZO), non-conducting materials (B), etc.
- Sample size: 6 in wafers, 4 in wafers, pieces.
- Power: 3 RF sources
- Number of gun: 4 guns
- Heating: unavailable
- Control: Software PhaseJ-II, Manual
Contact Email
thien.truong@anu.edu.au
![AJA International Sputter](/files/styles/wide/public/2023-09/AJA%20International%20Sputter.jpg?itok=aKCAGk1L)
![Inside chamber](/files/styles/max_325x325/public/2023-06/image2.jpeg?itok=OCE6QFzS)
![Plasma during deposition](/files/styles/max_325x325/public/2023-06/image3.jpg?itok=vVsm1-qc)