Capabilities
- Material: Metals (Ag, Al, Cr, Pd, MgF, LiF, CuOx, TiOx, MoOx, etc.)
- Number of boat: 3 thermal boats
- Suitable for thin metal deposition (<150 mm per deposition).
- Glove box integrated.
Contact Email
marco.ernst@anu.edu.au
Angstrom Engineering EvoVac Evaporator