Varian Evaporator


  • This system is a cryo-pumped thermal evaporator with base pressures in the 10-6 Torr range.
  • Typical source materials are melted by resistive heating in up to three metal evaporation boats or ceramic crucibles.
  • Evaporation rates are manually controlled by varying the output power of a DC power supply, allowing for currents up to 200 amps.


  • Material: Metals (Ag, Al, Cr, Pd, etc.)
  • Number of boat: 3 thermal boats
  • Suitable for thick metal deposition.
  • The sample holder is fixed.
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Varian Evaporator